Products

TYSTC

Production System-LPE1O6

 

LPE1O6

Single wafer 150mm epitaxy reactor
Hot wall inductive heating
Three-zone gas injection system
Hi–temperature robotized handling
Growth rate: up to 90 μm/h
[Close]

Copyright  2010All Rights Reserved.                 

Address: No.5,Industrial North 1st Road,Songshan Lake High-Tech Zone,Dongguan,Guangdong,China.   Postal:523808                     e-mail:enquiry@sicty.com