Production System-Aixtron 2800G4 WW

 



Equipment: Aixtron 2800G4 WW
         Warm-wall technique
         Radial flow type planetary reactor
         Mechanical drive plus gas foil rotation
         Capacity: 10 pcs (3inch/4inch)/ run  6pcs(6inch)/run
         Standard n-type doping and  p-type



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